JPH0183468U - - Google Patents
Info
- Publication number
- JPH0183468U JPH0183468U JP1987176694U JP17669487U JPH0183468U JP H0183468 U JPH0183468 U JP H0183468U JP 1987176694 U JP1987176694 U JP 1987176694U JP 17669487 U JP17669487 U JP 17669487U JP H0183468 U JPH0183468 U JP H0183468U
- Authority
- JP
- Japan
- Prior art keywords
- coating
- roller
- spiral grooves
- pitch
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987176694U JPH0183468U (en]) | 1987-11-19 | 1987-11-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987176694U JPH0183468U (en]) | 1987-11-19 | 1987-11-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0183468U true JPH0183468U (en]) | 1989-06-02 |
Family
ID=31468408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987176694U Pending JPH0183468U (en]) | 1987-11-19 | 1987-11-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0183468U (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03280416A (ja) * | 1990-03-29 | 1991-12-11 | G T C:Kk | レジストパターンの形成方法 |
-
1987
- 1987-11-19 JP JP1987176694U patent/JPH0183468U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03280416A (ja) * | 1990-03-29 | 1991-12-11 | G T C:Kk | レジストパターンの形成方法 |